Memory Architecture, immersion lithography, photolithography process equipment, low k1 imaging, semiconductor process flows, polarized illumination, Optics, Multi-node Multi-site program leadership, cutting edge photolithography equipment, metrology tools

dry strip, surface science, thickness measurement, Spc, selective chemical etching, fab metrology tools, Vapor etch, wet strip, data analysis systems, electrical evaluation methods, Doe, analytic methods related to material properties, memory process flow, vertical NAND, particle counters, process technology development