vertical NAND, dry strip, thickness measurement, Spc, selective chemical etching, fab metrology tools, Vapor etch, wet strip, data analysis systems, electrical evaluation methods, Doe, memory process flow, particle counters

immersion lithography, Spc, material characterization, semiconductor process flows, Optics, polarized illumination, cutting edge photolithography equipment, Memory Architecture, lithography simulation tools, photolithography process equipment roadmaps, low k1 imaging, Doe, basic statistical data analysis, metrology tools