Key Responsibilities
1. Equipment Ownership & Uptime
- Assume primary technical accountability for assigned etch tools, with a focus on LAM XLE and LAM Rainbow systems
- Sustain and continuously advance OEE, MTBF, and MTTR performance targets
- Establish and maintain equipment health monitoring frameworks and baseline controls encompassing SPC, FDC, fault codes, and alarm management
- Conduct daily tool performance reviews with thorough documentation of issues, corrective actions, and recovery plans
2. Maintenance & Troubleshooting
- Plan, execute, and refine preventive maintenance schedules in accordance with OEM guidelines and fab-level strategies
- Perform advanced troubleshooting across electrical, mechanical, vacuum, RF, gas delivery, and software subsystems
- Lead structured root cause analysis for chronic and high-impact failures using 8D, Fishbone, 5 Why, and equivalent methodologies
- Coordinate and supervise vendor field service engineers and contractors during major interventions, upgrades, and equipment rebuilds
3. Process and Equipment Interaction
- Partner with process engineering to ensure tool performance consistently meets CD, profile, uniformity, selectivity, and defectivity specifications
- Correlate equipment conditions with yield and parametric outcomes through analysis of tool logs, SPC charts, metrology data, and wafer maps
- Support process qualifications, chamber swaps, hardware changes, and recipe releases
- Maintain accurate chamber matching across tool sets
4. Continuous Improvement & Cost Reduction
- Identify and execute improvement initiatives targeting uptime gains, consumable life extension, and operating cost reduction
- Optimise spare parts strategy and consumables usage, including buffer stock levels, repair-versus-replace decisions, and refurbishment planning
- Participate in or lead CIP, Lean, or Six Sigma projects focused on productivity and quality advancement
- Support capacity expansion activities including chamber additions, throughput improvements, and software enhancements
5. Documentation, Procedures & Training
- Author and maintain SOPs, maintenance procedures, and troubleshooting guides relevant to assigned etch platforms
- Record all events, alarms, interventions, and engineering changes within the equipment history system (EHS/CMMS)
- Deliver technical training and hands-on coaching to equipment technicians, junior engineers, and shift personnel
- Enforce change management compliance across hardware, software, and recipe modifications
6. Safety & Compliance
- Ensure all activities adhere to EHS regulations, company safety standards, and cleanroom protocols
- Conduct and support risk assessments, LOTO procedures, and safety audits covering gas, chemical, RF, and high-voltage systems
- Support compliance with ISO, Automotive, and Quality Management System requirements as applicable
Job Requirements
- Bachelor's degree in Electrical and Electronics Engineering, Materials Science, Chemical Engineering, or an equivalent discipline
- Minimum 5 years of relevant experience in semiconductor etch, with direct hands-on experience on LAM XLE and LAM Rainbow platforms
- Strong analytical and creative problem-solving capabilities with rigorous attention to detail
- Effective interpersonal skills with the ability to operate autonomously and within cross-functional teams
- Proficiency in SPC, FMEA, and 8D problem-solving methodologies